Determination of stress from HR-XRD and Raman for GaN/AlInN/AlN/Sapphire HEMTs
Yazarlar (6)
Özlem Bayal
Gazi Üniversitesi
Ahmet Kürşat Bilgili
Gazi Üniversitesi
Mustafakemal Öztürk
Gazi Üniversitesi, Türkiye
Yunus Özen
Gazi Üniversitesi, Türkiye
Dr. Öğr. Üyesi Naki KAYA
Kafkas Üniversitesi, Türkiye
| Makale Türü |
Özgün Makale
(Ulusal alan endekslerinde (TR Dizin, ULAKBİM) yayınlanan tam makale)
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| Dergi Adı | Gazi University Journal of Science Part A: Engineering and Innovation | ||
| Dergi ISSN | 2147-9542 | ||
| Dergi Tarandığı Indeksler | TR DİZİN | ||
| Makale Dili | İngilizce | Basım Tarihi | 03-2025 |
| Cilt / Sayı / Sayfa | 12 / 1 / 119–126 | DOI | 10.54287/gujsa.1636694 |
| Özet |
| In this study, structural properties of GaN/AlInN/AlN/sapphire high electron mobility transistors (HEMTs), grown by metal organic chemical vapor deposition technique, are investigated. High resolution X-ray diffraction technique (HR-XRD) and Raman mesurements are made to determine stress values and stress type for GaN layers dependent on Al content. It is seen that stress values gained from these two techniques are approximately at the same level. It is noticed that there is tensile stress in all three samples according to Raman shift measurements. Also strain values are calculated by using full width at half maximum (FWHM) values in HR-XRD pattern. |
| Anahtar Kelimeler |
| XRD | Raman | GAN | AL | FWHM |
BM Sürdürülebilir Kalkınma Amaçları
| Atıf Sayıları |